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Department of Mechanical Engineering, NKUST
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Introduction
Introduction
Chairman
Educational objectives and program outcomes
Academic Grouping
Featured Lab.
Location
Organization
Faculty
Design and Manufacturing
Opto-Mechatronics and Control
Materials and Energy
Staff
Retired Faculty
Research results
Teacher Research results
Academics
Curriculum
English-Instructed Course
Regulations
Course Outline
Index
Organization
Materials and Energy
Materials and Energy
Faculty
Design and Manufacturing
Opto-Mechatronics and Control
Materials and Energy
Staff
Retired Faculty
School Year
93
Paper Title
Comparative study of polycrystalline Ti, amorphous Ti and multi-amorphous Ti as a barrier film for Cu Interconnect
Journal Title
J. Vac. Sci. & Tech. B
Volume
1
Type Of Author
First Author